Flat Sapphire Substrate for LED
Product description:
    Sapphire is composed by Al2O3 hexagonal structure single crystal. It has advantages such as high mechanical intensity, stable component, good light transmission, low dielectric loss, and excellent surface smoothness. It is ideal material for LED and LD. Crystal-Optech produces high quality flat sapphire substrates with excellent dicing, grinding, and polishing technology. 
    Application: GaN-LED
    1.  Patterned Sapphire Substrate material
    2.  material of LED epitaxy 

  • Technical index


No.  

Item

2inch

4inch

6inch

1

 Material

>99.996% single crystal Al2 O3

2

Orientation

C-axis [0001] tiled M-axis 0.2±0.1°

3

Primary flat

A-Axis[11-20] ±0.3°

4

Diameter

50.80±0.15mm

100±0.25mm

150±0.25mm

5

Thickness

430±15μm

650±25μm

900±25μm

1300±25μm

1000±25μm

6

Flat length

16±1mm

31±1mm

50±1mm

7.

TTV

≤5μm

≤15μm

≤25μm

8

BOW

-6~0μm

-20~0μm

-30~0μm

9

WARP

10μm

30μm

50μm

10

Front side Roughness

0.3nm

11

Back side roughness

Ra=0.5-1.3μm

12

Wafer edge

R-type/ T-type

13

Laser Mark

Front side/Backside

14

Surface quality

Free of foreign materials, crack, sawmark, chippings

15

Package

Vacuum packed cassette of 25pieces in a clean room


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