Patterned Sapphire Substrate for LED
Product description:
    PSS(short for Patterned Sapphire Substrate) has pattern which is micron size structure made on the surface of FSS. LED epitaxial layer growth on PSS will reduce LED sapphire substrate defects, and markedly increase the final luminous efficiency of LED.Mainly application: GaN-LED (as the material of LED epitaxy)

  • Technical index


No.  

Item

2inch

4inch

1

 Material

>99.996% single crystal Al2 O3

2

 Orientation

C-axis [0001] tiled M-axis 0.2±0.1°

3

Primary flat

A-Axis[11-20] ±0.3°

4

Diameter

50.80±0.15mm

100±0.25mm

5

Thickness

430±15μm

650±25μm

6

Flat length

16±1mm

31±1mm

7.

TTV

≤5μm

≤15μm

8

BOW

-6~0μm

-30~0μm

9

WARP

10μm

20μm

10

Back side roughness

Ra=0.5 -1.3μm

11

Pattern Bottom Diameter

2.6±0.15μm

12

Pattern Pitch

3.0±0.15μm

13

Pattern Height

1.6±0.15μm

14

Wafer edge

R-type/ T-type

15

Laser Mark

Front side/Backside

16

Surface quality

Free of foreign materials, crack, sawmark, chippings

17

Package

Vacuum packed cassette of 25pieces in a clean room


<< back
版权所有?2015 威尼斯官方网站-5994真人平台手机版登录 All Rights Reserved 浙ICP备13035140号策划&设计:翰臣科技
XML 地图 | Sitemap 地图